Design and Optimal Control of a Multistable, Cooperative Microactuator

In order to satisfy the demand for high functionality of future microdevices, research on new concepts multistable microactuators with enlarged working ranges becomes increasingly important. A challenge design such actuators lies in overcoming mechanical connections moved object, which limit its deflection angle or traveling distance. Although numerous approaches have already been proposed solve this issue, only a few considered multiple asymptotically stable resting positions. fill gap, we present microactuator that allows large vertical displacements freely moving permanent magnet millimeter-scale. Multiple equilibria are generated at predefined positions by superimposing magnetic fields, thus removing need constant energy input. achieve fast object movements low solenoid currents, apply combination piezoelectric and electromagnetic actuation, work as cooperative manipulators. Optimal trajectory planning flatness-based control ensure time- energy-efficient motion while being able compensate disturbances. We demonstrate advantage actuator terms expandability show effectiveness controller regard initial state uncertainty.